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Volume 26, Issue 4

April 2001

Microelectromechanical Systems (MEMS): Technology and Applications

29 articles in this issue

Microspheres Function as Microlenses for Projection Photolithography
Erin S. Carter
Research/Researchers 01 April 2001 Pages: 275 - 275
Monolithic SiGeC/Si Superlattice Structures Cool Electronic Devices
Steffen K. Kaldor
Research/Researchers 01 April 2001 Pages: 275 - 276
Self-Assembled Monolayers of BPS Control the Molecular Aggregation of Polymer-Dispersed Liquid-Crystal Films of 5CB
Elizabeth A. Shack
Research/Researchers 01 April 2001 Pages: 276 - 276
Infrared Liquid Immersion Microscopy Reveals Details of Green Bodies and Compaction Process
Siari S. Sosa
Research/Researchers 01 April 2001 Pages: 276 - 277
Photopolymerizable Glass Outperforms Traditional Holographic Materials
Donald F. Carter
Research/Researchers 01 April 2001 Pages: 277 - 277
Alumina With 50% Porosity Obtained After Freeze-Drying a Water-Based Slurry
Siari S. Sosa
Research/Researchers 01 April 2001 Pages: 277 - 278
Electrostatic Attraction Enables Precise Control in Thin-Film Assembly
Gregory Khitrov
Research/Researchers 01 April 2001 Pages: 278 - 278
Raman Spectroscopy Detects Carotenoid Levels in Human Retina
Cora Lind
Research/Researchers 01 April 2001 Pages: 278 - 279
Silver Selectively Deposited on Ferroelectric Barium Titanate Domains Enable Creation of Metallic Patterns with Submicron Features
Xianlong Ge
Research/Researchers 01 April 2001 Pages: 279 - 279
Washington News

OriginalPaper 01 April 2001 Pages: 280 - 280
Microelectro-mechanical Systems: Technology and Applications
David Bishop
Arthur Heuer
David Williams
OriginalPaper 01 April 2001 Pages: 282 - 288
Surface Micromachining: A Brief Introduction
Mehran Mehregany
Christian A. Zorman
OriginalPaper 01 April 2001 Pages: 289 - 290
Integrated MEMS Technologies
Andrea E. Franke
Tsu-Jae King
Roger T. Howe
OriginalPaper 01 April 2001 Pages: 291 - 295
Designing for MEMS Reliability
Susanne Arney
OriginalPaper 01 April 2001 Pages: 296 - 299
On-Chip Testing of Mechanical Properties of MEMS Devices
H. Kahn
A. H. Heuer
R. Ballarini
OriginalPaper 01 April 2001 Pages: 300 - 301
Tribology of MEMS
M. P. de Boer
T. M. Mayer
OriginalPaper 01 April 2001 Pages: 302 - 304
Measuring Motions of MEMS
Dennis M. Freeman
OriginalPaper 01 April 2001 Pages: 305 - 306
High-Aspect-Ratio Structures for MEMS
Stella W. Pang
OriginalPaper 01 April 2001 Pages: 307 - 308
Diamond and Amorphous Carbon MEMS
J. P. Sullivan
T. T. Friedmann
K. Hjort
OriginalPaper 01 April 2001 Pages: 309 - 311
Microsystems Technology (MST) and MEMS Applications: An Overview
Job Elders
Vincent Spiering
Steve Walsh
OriginalPaper 01 April 2001 Pages: 312 - 315
Defense Applications of MEMS
William C. Tang
Abraham P. Lee
OriginalPaper 01 April 2001 Pages: 318 - 319
A “Silicon Eye” Using Mems Micromirrors
Natalie Clark
OriginalPaper 01 April 2001 Pages: 320 - 324
The DMD™ Projection Display Chip: A MEMS-Based Technology
Larry J. Hornbeck
OriginalPaper 01 April 2001 Pages: 325 - 327
MEMS for Light-WaveNetworks
C. Randy Giles
David Bishop
Vladimir Aksyuk
OriginalPaper 01 April 2001 Pages: 328 - 329
Micromachining for rf Communications
Darrin J. Young
OriginalPaper 01 April 2001 Pages: 331 - 332
Microsystems for Chemical and Biological Applications
Duane Lindner
OriginalPaper 01 April 2001 Pages: 333 - 335
LIGA Technologies and Applications
Jill Hruby
OriginalPaper 01 April 2001 Pages: 337 - 340
Alan I. Taub Receives 2000 Woody Award

MRS News 01 April 2001 Pages: 343 - 343
MRS Invites Nominations for the Von Hippel Award, Turnbull Lectureship, and MRS Medal

MRS News 01 April 2001 Pages: 343 - 343

Volume 26, Issue 4

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